Products

• IntelliSuite 8

The world's most advanced MEMS CAD/EDA

Used by MEMS professionals worldwide for design, development and manufacturing of MEMS, IntelliSuite has firmly established itself as industry’s standard tool. As such, IntelliSense provides MEMS companies and individual users with a complete living design environment.

IntelliSuite is a tightly integrated design environment that will link your entire MEMS organization together. Built to scale from a point tool to an organization-wide tool, IntelliSuite unifies various engineering and manufacturing tasks into a single living design environment.

Designed around collaboration, IntelliSuite allows the design and process teams collaborate on MEMS devices that can be prototyped and manufactured with fewer costly iterations. IntelliSuite starts the design process from fabrication machine settings, rather than device geometry — an approach that helps create highly accurate models. In turn, this demonstrates that device geometry and behavior are a direct result of process conditions. What does this all mean? That IntelliSuite optimizes MEMS designs prior to fabrication, which reduces prototype development cycle time and cuts manufacturing costs.

The industry standard

After more than a decade in continuous development, IntelliSuite now boasts the widest range of features available in a MEMS tool, and remains unsurpassed in its simulation capabilities, robustness and ease of use.

That’s why IntelliSuite serves users in more than 25 countries, including all of the top 5 MEMS manufacturers, research organizations and MEMS universities. And that’s why it’s the industry standard software for MEMS.

Design the next small thing …

IntelliSuite comes with all the design tools required to take your product from concept to market. We ship a full complement of tools with which you can perform process modeling, device layout and device analysis. In fact, IntelliSuite comes standard with completely coupled electrical, piezo-electrical, mechanical and thermal analysis tools for executing linear or non-linear static or transient analysis, while optional modules for electromagnetic, fluidic and system analysis are also available.

At IntelliSense, we constantly monitor the latest developments in the MEMS industry for new features and capabilities. And if we haven’t already provided everything you’re looking for, we can develop customized features to meet your specific needs.

Year to date, countless MEMS professionals have successfully utilized IntelliSuite to design and bring many MEMS to market. If you’re a MEMS professional, IntelliSuite will give you the unlimited creative freedom to realize virtually any MEMS you can dream up. Use it to design and develop your next big or small idea!

Intellisuite Modules:

Process modeling tools

• MEMaterial (Database & process optimization)
• AnisE (Si Wet Anisotropic etch)
• RECIPE (RIE/ICP Simulator)
• IntelliFAB (Process visual.)
• MEMS Cost Module

Design tools

• IntelliMask (Layout)
• IntelliMask Pro (Layout)
• 3D Builder

Analysis tools

• Thermoelectromechanical
• Packaging
• PiezoMEMS
• ElectroMagnetics & RF MEMS
• BioMEMS & MicroFluidics

System modeling tools

• System Model Extractor (SME)
• SYNPLE (System simulation)
• MEMS-SoC Constructor Kit (Libraries)

• SYNPLE

Multi-domain system synthesis and simulation for microsystems

Talking ‘bout a revolution…

Developed by IntelliSense to answer the unique needs of the microsystem and nanosystem community, SYNPLE is a system-level simulator for multi-scale (macro, micro, nano) phenomenon simulations. As a MEMS design professional, you always seek new ways to realize your designs and, ultimately, bring them to market. With SYNPLE, you can. This revolutionary tool will enable you to work in multiple domains — simply and without limits.

Expand your horizons

Do your current simulation tools stifle the reach of your imagination? Impose limitations on your designs and work product? SYNPLE will allow you to follow your out-of-the-box vision — and create simulations to match. SYNPLE’s advanced element libraries, user-defined elements and a user expandable architecture will significantly increase your present multi-physical simulation capabilities. As a result, you can explore a whole new design universe and be as creative as you want to be!

System-level simulation, made simple

While SYNPLE’s range is wide enough to create complex simulations, its user interface is exactly what the name implies — simple! In fact, if you’ve ever created a flow chart (who hasn’t in this business?), then you’ll take to SYNPLE like a fish to water. By relying extensively on the familiar “drag-and-drop” function, rather than arcane interfaces, it’s both easy to learn and easy to use.

Elements, unlimited

To further your capabilities, IntelliSense ships SYNPLE with an extensive line of comprehensive element libraries for your use. These include analog, digital, mixed-signal, micromechanics, semi-conductor, MEMS and biological modules. And if these aren’t enough, SYNPLE’s expandable architecture will enable you to expand the libraries by creating customized elements of your own.

Build from the bottom, up

SYNPLE’s bottom-up modeling capability enables you to drag and drop individual elements, such as atomic, compound and device elements, from different domains and wire them up to create complex systems. For instance, you might draw elements from SYNPLE’s MEMS library, which comprises atomic elements like beams and plates; compound elements like serpentine springs and comb drives, and device elements like switches, accelerometers and gyros — to create your own complex systems from the bottom up.

Develop from the top, down

Is top-down modeling a more desirable capability for your needs? If so, then SYNPLE makes that simple as well — allowing you to import your existing finite element models and combine them into new, more complex systems.

The seamless integration of System Model Extractor (SME) with SYNPLE is a powerful combination that allows you to create accurate N-DOF (n degrees of freedom) device level black box models that fully capture the dynamic and harmonic responses of even the most complex of MEMS devices. Our tests have shown a 100-1000x improvement in speed in performing dynamic analyses compared with traditional FEA.Maximize creativity, time and savings

When IntelliSense developed the SYNPLE system-level simulator, we incorporated user benefits that would make a real difference to your bottom line, rather than adding lots of extraneous bells and whistles. First and foremost, SYNPLE enables you to explore a large design space in a short amount of time — which maximizes your time and creativity. To save time further, it allows you to funnel, and quickly whittle down, a large number of design options.

And to minimize your manufacturing costs, SYNPLE makes it possible to understand the ultimate impact of your design parameters on manufacturing yield. Enjoy maximum creativity at minimum time and cost — it’s that SYNPLE!

Overview

• Comprehensive element libraries include analog digital, mixed-signal, micromechanics, semi- conductor, MEMS and biological elements
• Easy to learn and use with no complex interfaces
• Perform bottom-up modeling from different domains to create complex systems
• Perform top-down modeling by importing existing finite element models
• Simulation and analysis capabilities include transient response, small- and large-signal analysis, steady-state analysis, sensitivity analysis (AC and DC), noise analysis, parametric analysis and Monte Carlo analysis.

• MEMS-Soc

Microsystem design automation tools

The MEMS-SoC Constructor Kit is a set of optimized Verilog-A libraries for the design of MEMS-based systems on a chip. MEMS-SoC directly fits into popular EDA workflows, allowing you to integrate MEMS and CMOS on the same chip.

Hierarchical MEMS design

Complex MEMS structures can be built from atomic elements, such as linear and non-linear beams, rigid and elastic plates, and electrostatic gaps. For instance, multiple beams and electrostatic gaps can be combined to form comb drives, while multiple beams can be joined to form complex serpentine springs. The MEMS-SoC kit provides you with a complete library of elements that can be combined in a hierarchical fashion to form a wide range of MEMS devices.

Real-world considerations

Each of the elements in the MEMS-SoC element library was designed by MEMS engineers with in-depth understanding of CMOS/MEMS fabrication. Secondary effects that can have a significant impact on the device performance, such as trapezoidal side-walls, stresses in non-linear beams (24 DOF) and squeeze film-damping effects in plate mechanics are included. The element library is large enough to model a large number of MEMS devices; for instance, CMOS-MEMS beam library includes 16 elements, which fully capture different beam cross-sections encountered in CMOS-MEMS.

MEMS-SoC really shines in its implementation of plate mechanics. Each plate can be connected to up to 12 springs/beams. Release holes can be accurately defined in the plate. Plate behavior automatically includes sophisticated Couette/Reynolds squeeze film phenomenon (Veijola/Tang models for fluid dynamics are automatically included in plate, beam and comb drive behavior).

Sophisticated algorithms have been implemented to fully encapsulate complex 3D electrostatic gap mechanics. Each gap element can have up to 24 degrees of freedom. Contact and post-contact mechanics are included to capture the electrostatic pull-in behavior, while other phenomena like post-contact electrode bounce also are included.

Full range of analyses

The MEMS-SoC library allows you to perform a comprehensive selection of analyses on your MEMS devices — from DC, AC, transient, steady-state, sensitivity, parametric and Monte Carlo analyses.

Advantages

• Fits into existing mixed-signal environments
• Compatible with existing investment in EDA tools
• Low training costs
• Integrated workflow to lower time to market
• Surface micro-machining (Poly-Si) or SOI based MEMS-CMOS integration

Sample Applications for MEMS-based systems-on-a-chip

• Inertial devices: accelerometers, gyroscopes, switches
• RF MEMS: switches, filters, resonators
• Optical MEMS: 2D/3D switches, VOAs, tunable lasers, gratings, displays, controllable mirrors
• Microsensors: pressure sensors, microphones, AFM cantilevers, etc.
• Actuators: lateral and transverse comb drives, bistable mechanisms, valves, electrostatic actuators